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Hybrid lithography approach for single mode polymeric waveg..:
Weyers, David
;
Mistry, Akash
;
Nieweglowski, Krzysztof
.
978-1-6654-7943-1. , 2022
Link:
https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa2-88..
RT Journal T1
Hybrid lithography approach for single mode polymeric waveguides and out-of-plane coupling mirrors
UL https://suche.suub.uni-bremen.de/peid=base-fttudresden:oai:qucosa:de:qucosa:88016&Exemplar=1&LAN=DE A1 Weyers, David A1 Mistry, Akash A1 Nieweglowski, Krzysztof A1 Bock, Karlheinz PB IEEE YR 2022 K1 optical interconnects K1 single mode K1 ORMOCER® K1 hybrid lithography K1 direct patterning K1 UV-lithography K1 2-photon- polymerization direct-laser-writing K1 micro-mirrors K1 optische Verbindungen K1 Singlemode K1 Hybridlithographie K1 direkte Strukturierung K1 UV-Lithographie K1 2-Photonen-Polymerisation K1 direktes Laserschreiben K1 Mikrospiegel K1 info:eu-repo/classification/ddc/620 K1 ddc:620 JF 978-1-6654-7943-1 LK http://dx.doi.org/https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa2-880164 DO https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa2-880164 SF ELIB - SuUB Bremen
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