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1
The connection between spokes and the energy distribution f..:
Breilmann, Wolfgang (M. Sc.)
https://hss-opus.ub.ruhr-uni-bochum.de/opus4/frontdoor/index/index/docId/5366. , 2017
Link:
https://hss-opus.ub.ruhr-uni-bochum.de/opus4/frontdoor..
RT Journal T1 <Title>The connection between spokes and the energy distribution function of ions in high power impulse magnetron sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftubbochumdiss:oai:hss-opus.ub.ruhr-uni-bochum.de:5366&Exemplar=1&LAN=DE A1 Breilmann, Wolfgang (M. Sc.) YR 2017 K1 Plasma K1 Sputtern K1 Magnetron K1 Hochleistungsimpulsmagnetronsputtern K1 Niederdruck K1 ddc:530 JF https://hss-opus.ub.ruhr-uni-bochum.de/opus4/frontdoor/index/index/docId/5366 LK http://dx.doi.org/https://hss-opus.ub.ruhr-uni-bochum.de/opus4/frontdoor/index/index/docId/5366 DO https://hss-opus.ub.ruhr-uni-bochum.de/opus4/frontdoor/index/index/docId/5366 SF ELIB - SuUB Bremen
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