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1 Ergebnisse
1
Nanopatterning and nanomachining with table-top extreme ult..:
Marconi, M.C
;
Wachulak, P.W
;
Capeluto, M.G
...
http://hdl.handle.net/20.500.12110/paper_02729172_v961_n_p230_Marconi. ,
Link:
https://hdl.handle.net/20.500.12110/paper_02729172_v96..
RT Journal T1
Nanopatterning and nanomachining with table-top extreme ultraviolet lasers
UL https://suche.suub.uni-bremen.de/peid=base-ftunibueairesbd:todo:paper_02729172_v961_n_p230_Marconi&Exemplar=1&LAN=DE A1 Marconi, M.C A1 Wachulak, P.W A1 Capeluto, M.G A1 Vaschenko, G A1 Bravo, H A1 Menoni, C.S A1 Rocca, J A1 Anderson, E.H A1 Chao, W A1 Attwood, D A1 Hemberg, O A1 Frazer, B A1 Bloom, S K1 Extreme ultraviolet lasers K1 Fresnell zone plate (FZP) lens K1 Extreme ultraviolet lithography K1 Photoresists K1 Polymethyl methacrylates K1 Silicon wafers K1 Semiconductor quantum dots JF http://hdl.handle.net/20.500.12110/paper_02729172_v961_n_p230_Marconi LK http://dx.doi.org/https://hdl.handle.net/20.500.12110/paper_02729172_v961_n_p230_Marconi DO https://hdl.handle.net/20.500.12110/paper_02729172_v961_n_p230_Marconi SF ELIB - SuUB Bremen
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