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Integration of a CMOS LSI Chiplet into Micro Flexible Devic..:

Misumi, Kei ; Usami, Naoto ; Higo, Akio...
info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911739. , 2022

Link: https://hal.science/hal-03891095

RT Journal
T1 <Title>Integration of a CMOS LSI Chiplet into Micro Flexible Devices for Remote Electrostatic Actuation</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftunifranchecom:oai:HAL:hal-03891095v1&Exemplar=1&LAN=DE
				
A1 Misumi, Kei
A1 Usami, Naoto
A1 Higo, Akio
A1 Ulliac, Gwenn
A1 Piranda, Benoit
A1 Bourgeois, Julien
A1 Mita, Yoshio
PB HAL CCSD
YR 2022
K1 [INFO.INFO-ET]Computer Science [cs]/Emerging Technologies [cs.ET]
K1 [INFO.INFO-DC]Computer Science [cs]/Distributed
K1 Parallel
K1 and Cluster Computing [cs.DC]
K1 [INFO.INFO-SE]Computer Science [cs]/Software Engineering [cs.SE]
K1 [INFO.INFO-IU]Computer Science [cs]/Ubiquitous Computing
K1 [INFO.INFO-CR]Computer Science [cs]/Cryptography and Security [cs.CR]
K1 [INFO.INFO-MA]Computer Science [cs]/Multiagent Systems [cs.MA]
K1 [INFO.INFO-MO]Computer Science [cs]/Modeling and Simulation
K1 [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
JF info:eu-repo/semantics/altIdentifier/doi/10.1109/DTIP56576.2022.9911739
LK http://dx.doi.org/https://hal.science/hal-03891095
DO https://hal.science/hal-03891095
SF ELIB - SuUB Bremen

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