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Methodology for Active Junction Profile Extraction in thin ..:

Mota Frutuoso, Tadeu ; Garros, Xavier ; Batude, Perrine...
info:eu-repo/semantics/altIdentifier/doi/10.1109/VLSITechnologyandCir46769.2022.9830504. , 2022

Link: https://hal.science/hal-04069091

RT Journal
T1 <Title>Methodology for Active Junction Profile Extraction in thin film FD-SOI Enabling performance driver identification in 500°C devices for 3D sequential integration</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftunigrenoble:oai:HAL:hal-04069091v1&Exemplar=1&LAN=DE
				
A1 Mota Frutuoso, Tadeu
A1 Garros, Xavier
A1 Batude, Perrine
A1 Brunet, Laurent
A1 Lacord, Joris
A1 Sklenard, Benoit
A1 Lapras, Valérie
A1 Fenouillet-Beranger, Claire
A1 Ribotta, Mickael
A1 Magalhaes-Lucas, Alexandre
A1 Kanyandekwe, Joël
A1 Kies, Rabah
A1 Romano, Giovanni
A1 Catapano, Edoardo
A1 Cassé, Mickaël
A1 Lugo-Alvarez, José
A1 Ferrari, Philippe
A1 Gaillard, Frédéric
PB HAL CCSD; IEEE
YR 2022
K1 resistance
K1 silicon-on-insulator
K1 three-dimensional displays
K1 VLSI (Very Large Scale Integration)
K1 capacitance
K1 performance evaluation
K1 predictive models
K1 PACS 85.42
K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
JF info:eu-repo/semantics/altIdentifier/doi/10.1109/VLSITechnologyandCir46769.2022.9830504
LK http://dx.doi.org/https://hal.science/hal-04069091
DO https://hal.science/hal-04069091
SF ELIB - SuUB Bremen

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