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1 Ergebnisse
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Water-soluble bio-sourced resist interactions with fluorina..:
Durin, Paule
;
Sysova, Olha
;
Téolis, Alexandre
...
info:eu-repo/semantics/altIdentifier/doi/10.1116/6.0002934. , 2023
Link:
https://hal.science/hal-04266493
RT Journal T1
Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process
UL https://suche.suub.uni-bremen.de/peid=base-ftunihautealsace:oai:HAL:hal-04266493v1&Exemplar=1&LAN=DE A1 Durin, Paule A1 Sysova, Olha A1 Téolis, Alexandre A1 Trombotto, Stéphane A1 Hajjar-Garreau, Samar A1 Delair, Thierry A1 Servin, Isabelle A1 Rochat, Névine A1 Tiron, Raluca A1 Gablin, Corinne A1 Soppera, Olivier A1 Benamrouche, Aziz A1 Gehin, Thomas A1 Léonard, Didier A1 Leclercq, Jean-Louis A1 Chevolot, Yann PB HAL CCSD; AVS through the American Institute of Physics YR 2023 K1 [SPI]Engineering Sciences [physics] K1 [CHIM]Chemical Sciences JF info:eu-repo/semantics/altIdentifier/doi/10.1116/6.0002934 LK http://dx.doi.org/https://hal.science/hal-04266493 DO https://hal.science/hal-04266493 SF ELIB - SuUB Bremen
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