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Impact of PECVD μc-Si:H deposition on tunnel oxide for pass..:
Desthieux, Anatole
;
Posada, Jorge
;
Grand, Pierre-Philippe
...
info:eu-repo/semantics/altIdentifier/doi/10.1051/epjpv/2020001. , 2020
Link:
https://hal.science/hal-03447251
RT Journal T1
Impact of PECVD μc-Si:H deposition on tunnel oxide for passivating contacts
UL https://suche.suub.uni-bremen.de/peid=base-ftuniparissaclay:oai:HAL:hal-03447251v1&Exemplar=1&LAN=DE A1 Desthieux, Anatole A1 Posada, Jorge A1 Grand, Pierre-Philippe A1 Broussillou, Cédric A1 Bazer-Bachi, Barbara A1 Goaer, Gilles A1 Messou, Davina A1 Bouttemy, Muriel A1 Drahi, Etienne A1 Roca I Cabarrocas, Pere PB HAL CCSD; EDP sciences YR 2020 K1 [INFO.INFO-BT]Computer Science [cs]/Biotechnology JF info:eu-repo/semantics/altIdentifier/doi/10.1051/epjpv/2020001 LK http://dx.doi.org/https://hal.science/hal-03447251 DO https://hal.science/hal-03447251 SF ELIB - SuUB Bremen
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