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1 Ergebnisse
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Porosity evaluation of PoSi wafer using a nondestructive ul..:
Bustillo, Julien
;
Fortineau, Jérôme
;
Capelle, Marie
...
hal-00810963. , 2012
Link:
https://hal.science/hal-00810963
RT Journal T1
Porosity evaluation of PoSi wafer using a nondestructive ultrasonic technic
UL https://suche.suub.uni-bremen.de/peid=base-ftunitours:oai:HAL:hal-00810963v1&Exemplar=1&LAN=DE A1 Bustillo, Julien A1 Fortineau, Jérôme A1 Capelle, Marie A1 Vander Meulen, François A1 Haumesser, Lionel A1 Gautier, Gael A1 Lethiecq, Marc PB HAL CCSD YR 2012 K1 Porous silicon K1 nondestructive testing K1 ultrasound K1 [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] JF hal-00810963 LK http://dx.doi.org/https://hal.science/hal-00810963 DO https://hal.science/hal-00810963 SF ELIB - SuUB Bremen
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