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1 Ergebnisse
1
Embedded spectroscopic reflectometry metrology on FEOL sili..:
Bourzgui, Sophia
;
Roussy, Agnès
;
Blue, Jakey
...
info:eu-repo/semantics/altIdentifier/doi/10.1109/ASMC.2017.7969267. , 2017
Link:
https://hal.science/hal-01622569
RT Journal T1 <Title>Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment: ER: Equipement reliability and productivity enhancements</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivaixmarseil:oai:HAL:hal-01622569v1&Exemplar=1&LAN=DE A1 Bourzgui, Sophia A1 Roussy, Agnès A1 Blue, Jakey A1 Georges, Gaëlle A1 Faivre, Emilie A1 Labory, Karen A1 Pinaton, Jacques PB HAL CCSD YR 2017 K1 metrology model K1 spectroscopic reflectometry K1 multilayer thickness measurement K1 Shallow Trench Isolation (STI) K1 Chemical- Mechanical Planarization (CMP) process K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics K1 [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic JF info:eu-repo/semantics/altIdentifier/doi/10.1109/ASMC.2017.7969267 LK http://dx.doi.org/https://hal.science/hal-01622569 DO https://hal.science/hal-01622569 SF ELIB - SuUB Bremen
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