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High laser induced damage threshold photoresists for nano-i..:

Kabouraki, Elmina ; Melissinaki, Vasileia ; Yadav, Amit...
https://publications.aston.ac.uk/id/eprint/42905/1/10.1515_nanoph_2021_0263.pdf.  , 2021
Link: https://publications.aston.ac.uk/id/eprint/42905/