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1 Ergebnisse
1
An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applic..:
Mansoor, Mohtashim
;
Haneef, Ibraheem
;
Akhtar, Suhail
...
https://www.repository.cam.ac.uk/handle/1810/286875. , 2016
Link:
https://www.repository.cam.ac.uk/handle/1810/286875
RT Journal T1
An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications
UL https://suche.suub.uni-bremen.de/peid=base-ftunivcam:oai:www.repository.cam.ac.uk:1810_286875&Exemplar=1&LAN=DE A1 Mansoor, Mohtashim A1 Haneef, Ibraheem A1 Akhtar, Suhail A1 Rafiq, Muhammad Aftab A1 De Luca, Andrea A1 Ali, Syed Zeeshan A1 Udrea, Florin PB MDPI AG; http://dx.doi.org/10.3390/s16111608; Sensors (Basel) YR 2016 K1 CMOS K1 DRIE K1 MEMS K1 SOI K1 aerospace K1 dense sensor packing K1 fluid dynamics K1 multi-sensor K1 piezoresistive pressure sensor K1 sensor system K1 thermal flow rate sensor K1 thermodiodes JF https://www.repository.cam.ac.uk/handle/1810/286875 LK http://dx.doi.org/https://www.repository.cam.ac.uk/handle/1810/286875 DO https://www.repository.cam.ac.uk/handle/1810/286875 SF ELIB - SuUB Bremen
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