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1 Ergebnisse
1
Development of broadband high-frequency piezoelectric micro..:
Wang, Xu-Bo
;
He, Le-Ming
;
Ma, You-Cao
...
info:eu-repo/semantics/altIdentifier/doi/10.3390/s21051823. , 2021
Link:
https://hal.science/hal-03260141
RT Journal T1
Development of broadband high-frequency piezoelectric micromachined ultrasonic transducer array
UL https://suche.suub.uni-bremen.de/peid=base-ftunivclille:oai:HAL:hal-03260141v1&Exemplar=1&LAN=DE A1 Wang, Xu-Bo A1 He, Le-Ming A1 Ma, You-Cao A1 Liu, Wen-Juan A1 Xu, Wei-Jiang A1 Ren, Jun-Yan A1 Riaud, Antoine A1 Zhou, Jia PB HAL CCSD; MDPI YR 2021 K1 PDMS K1 PZT K1 PMUT K1 high-frequency K1 wide bandwidth K1 micromachining K1 two-dimensional array K1 rangefinder K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics K1 [SPI]Engineering Sciences [physics] K1 [SPI.MAT]Engineering Sciences [physics]/Materials K1 [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] K1 [INFO]Computer Science [cs] K1 [PHYS]Physics [physics] JF info:eu-repo/semantics/altIdentifier/doi/10.3390/s21051823 LK http://dx.doi.org/https://hal.science/hal-03260141 DO https://hal.science/hal-03260141 SF ELIB - SuUB Bremen
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