Arts, Karsten ; Thepass, Harvey ; Verheijen, Marcel A...
Arts , K , Thepass , H , Verheijen , M A , Puurunen , R L , Kessels , W M M & Knoops , H C M 2021 , ' Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2 ' , Chemistry of Materials , vol. 33 , no. 13 , pp. 5002-5009 . https://doi.org/10.1021/acs.chemmater.1c00781.  , 2021