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1 Ergebnisse
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Modellierung und Untersuchungen zur Esterspaltung in modern..:
Rodríguez Cantó, Pedro Javier
https://opus4.kobv.de/opus4-fau/frontdoor/index/index/docId/360. , 2006
Link:
https://opus4.kobv.de/opus4-fau/frontdoor/index/index/..
RT Journal T1
Modellierung und Untersuchungen zur Esterspaltung in modernen Photoresistmaterialien ; Modelling und Investigation of the ester cleavage in modern photoresist materials
UL https://suche.suub.uni-bremen.de/peid=base-ftuniverlangen:oai:ub.uni-erlangen.de-opus:360&Exemplar=1&LAN=DE A1 Rodríguez Cantó, Pedro Javier YR 2006 K1 Photoresist K1 Tiefes Ultraviolett K1 Diffusion K1 Säure K1 Belichtung K1 Inhibitor K1 Modellierung K1 Simulation K1 Lithographie K1 ddc:540 JF https://opus4.kobv.de/opus4-fau/frontdoor/index/index/docId/360 LK http://dx.doi.org/https://opus4.kobv.de/opus4-fau/frontdoor/index/index/docId/360 DO https://opus4.kobv.de/opus4-fau/frontdoor/index/index/docId/360 SF ELIB - SuUB Bremen
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