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1 Ergebnisse
1
A mems variable optical attenuator based on a vertical comb..:
School of Optoelectronic Engineering, Xi'an Technological University, Shaanxi, China ( host institution )
;
Cheng, J. ( author )
;
Liu, W. ( author )
...
Sensors and Actuators A: Physical. , 2017
Link:
https://doi.org/10.1016/j.sna.2017.11.043
RT Journal T1
A mems variable optical attenuator based on a vertical comb drive with self-elevated stators
UL https://suche.suub.uni-bremen.de/peid=base-ftunivflorida:oai:UFDC:LS00593163_00001&Exemplar=1&LAN=DE A1 School of Optoelectronic Engineering, Xi'an Technological University, Shaanxi, China ( host institution ) A1 Cheng, J. ( author ) A1 Liu, W. ( author ) A1 Chen, Q. ( author ) A1 Xu, N. ( author ) A1 Sun, Q. ( author ) A1 Liu, Y. ( author ) A1 Wang, W. ( author ) A1 Xie, H. ( UF author ) PB Elsevier B.V. YR 2017 K1 Vertical comb drive K1 Self-aligned vertical comb drive K1 Micromirror K1 Voa K1 Bimorph K1 Microactuator JF Sensors and Actuators A: Physical LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2017.11.043 DO https://doi.org/10.1016/j.sna.2017.11.043 SF ELIB - SuUB Bremen
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