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1 Ergebnisse
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Local laser oxidation of titanium film for post-fabrication..:
Aleksandr V. Tronev (14356341)
;
Mikhail V. Parfenov (2232046)
;
Sergey I. Bozhko (11128244)
...
https://figshare.com/articles/preprint/Local_laser_oxidation_of_titanium_film_for_post-fabrication_trimming_of_photonic_integrated_circuits/21846462. , 2021
Link:
https://doi.org/10.48550/arxiv.2111.02884
RT Journal T1 <Title>Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivfreestate:oai:figshare.com:article_21846462&Exemplar=1&LAN=DE A1 Aleksandr V. Tronev (14356341) A1 Mikhail V. Parfenov (2232046) A1 Sergey I. Bozhko (11128244) A1 Andrey M. Ionov (14356344) A1 Rais N. Mozhchil (10262706) A1 Sergey V. Chekmazov (11128247) A1 Petr M. Agruzov (14356347) A1 Igor V. Ilichev (14356350) A1 Aleksandr V. Shamrai (14356353) YR 2021 K1 Physics (arXiv) K1 physics.app-ph (arXiv) K1 physics.optics (arXiv) JF https://figshare.com/articles/preprint/Local_laser_oxidation_of_titanium_film_for_post-fabrication_trimming_of_photonic_integrated_circuits/21846462 LK http://dx.doi.org/https://doi.org/10.48550/arxiv.2111.02884 DO https://doi.org/10.48550/arxiv.2111.02884 SF ELIB - SuUB Bremen
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