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1 Ergebnisse
1
Deep UV photolithography enhanced geometric homogeneity for..:
Yahui Xiao (11885782)
;
Feifan Wang (1525195)
;
Dun Mao (6312041)
...
https://figshare.com/articles/preprint/Deep_UV_photolithography_enhanced_geometric_homogeneity_for_low_loss_photonic_crystal_waveguides/21871665. , 2021
Link:
https://doi.org/10.48550/arxiv.2104.09293
RT Journal T1 <Title>Deep UV photolithography enhanced geometric homogeneity for low loss photonic crystal waveguides</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivfreestate:oai:figshare.com:article_21871665&Exemplar=1&LAN=DE A1 Yahui Xiao (11885782) A1 Feifan Wang (1525195) A1 Dun Mao (6312041) A1 Thomas Kananen (6312044) A1 Tiantian Li (53740) A1 Hwaseob Lee (14384835) A1 Zi Wang (324031) A1 Tingyi Gu (1233726) YR 2021 K1 Physics (arXiv) K1 physics.app-ph (arXiv) K1 physics.optics (arXiv) JF https://figshare.com/articles/preprint/Deep_UV_photolithography_enhanced_geometric_homogeneity_for_low_loss_photonic_crystal_waveguides/21871665 LK http://dx.doi.org/https://doi.org/10.48550/arxiv.2104.09293 DO https://doi.org/10.48550/arxiv.2104.09293 SF ELIB - SuUB Bremen
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