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Mechanical investigations of free-standing SiN membranes pa..:

Ali A. Darki (14414607) ; Robin V. Nielsen (14414610) ; Jens V. Nygaard (14414613).
https://figshare.com/articles/preprint/Mechanical_investigations_of_free-standing_SiN_membranes_patterned_with_one-dimensional_photonic_crystal_structures/21886779.  , 2022