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Process Development for Batch Production of Micro-Milling T..:
Wittek, Christian-G. R
;
Steinhoff, Lukas
;
Raumel, Selina
...
DOI:https://doi.org/10.3390/mi14030580. , 2023
Link:
https://www.repo.uni-hannover.de/handle/123456789/1498
RT Journal T1 <Title>Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivhannover:oai:www.repo.uni-hannover.de:123456789_14981&Exemplar=1&LAN=DE A1 Wittek, Christian-G. R A1 Steinhoff, Lukas A1 Raumel, Selina A1 Reißfelder, Michael A1 Dencker, Folke A1 Wurz, Marc C PB Basel : MDPI YR 2023 K1 batch production K1 micro-milling K1 photolithography K1 reactive ion etching K1 silicon carbide K1 ddc:620 JF DOI:https://doi.org/10.3390/mi14030580 LK http://dx.doi.org/https://www.repo.uni-hannover.de/handle/123456789/14981 DO https://www.repo.uni-hannover.de/handle/123456789/14981 SF ELIB - SuUB Bremen
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