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1 Ergebnisse
1
Role of Nanoimprint Lithography for Strongly Miniaturized O..:
Hillmer, Hartmut
;
Woidt, Carsten
;
Istock, André
...
doi:10.3390/nano11010164. , 2021
Link:
https://doi.org/10.17170/kobra-202102113197
RT Journal T1
Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers
UL https://suche.suub.uni-bremen.de/peid=base-ftunivkassel:oai:oai.bibliothek.uni-kassel.de:123456789_12496&Exemplar=1&LAN=DE A1 Hillmer, Hartmut A1 Woidt, Carsten A1 Istock, André A1 Kobylinskiy, Aliaksei A1 Nguyen, Duc Toan A1 Ahmed, Naureen A1 Brunner, Robert A1 Kusserow, Thomas YR 2021 K1 nanoimprint K1 photonic nanomaterials K1 optical spectrometers K1 interferometers K1 Fabry– Pérot filters K1 detector arrays K1 tunable MEMS K1 linewidth K1 miniaturization K1 ddc:530 K1 swd:Optische Spektroskopie K1 swd:Spektrometer K1 swd:Nanophotonik K1 swd:Lithografie K1 swd:Linienbreite JF doi:10.3390/nano11010164 LK http://dx.doi.org/https://doi.org/10.17170/kobra-202102113197 DO https://doi.org/10.17170/kobra-202102113197 SF ELIB - SuUB Bremen
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