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1 Ergebnisse
1
Optical Sensor Array based Nanospectrometer: Fabrication of..:
Hafiz, Muhammad Ikram
http://nbn-resolving.org/urn:nbn:de:hebis:34-2017051152527. , 2017
Link:
http://nbn-resolving.org/urn:nbn:de:hebis:34-201705115..
RT Journal T1
Optical Sensor Array based Nanospectrometer: Fabrication of high resolution 3D NanoImprint master templates and bonding of Fabry-Pérot filter array onto photodetector array
UL https://suche.suub.uni-bremen.de/peid=base-ftunivkassel:oai:oai.bibliothek.uni-kassel.de:123456789_2017051152527&Exemplar=1&LAN=DE A1 Hafiz, Muhammad Ikram YR 2017 K1 Miniaturisierung K1 Optische Spektroskopie K1 Nanospektrometer K1 Fabry-Pérot-Filterarray K1 3D NanoImprint Lithographie (3D-NIL) K1 Masterstempel K1 Oberflächenkonforme Lithografie (SCIL) K1 Hybridintegration K1 Waferbonding K1 ddc:500 K1 ddc:530 K1 ddc:600 K1 ddc:620 K1 swd:Miniaturisierung K1 swd:Optische Spektroskopie K1 swd:Nanotechnologie K1 swd:Nanoprägen K1 swd:Lithografie K1 swd:Hybridtechnik K1 swd:Wafer K1 swd:Bonden JF http://nbn-resolving.org/urn:nbn:de:hebis:34-2017051152527 LK http://nbn-resolving.org/urn:nbn:de:hebis:34-2017051152527 DO http://nbn-resolving.org/urn:nbn:de:hebis:34-2017051152527 SF ELIB - SuUB Bremen
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