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Effect of argon ion energy on the performance of silicon ni..:
Alpuim, P
;
Majee, S
;
Cerqueira, M. F
...
http://www.sciencedirect.com/science/article/pii/S0040609015009268. , 2015
Link:
http://hdl.handle.net/1822/39804
RT Journal T1 <Title>Effect of argon ion energy on the performance of silicon nitridemultilayer permeation barriers grown by hot-wire CVD on polymers</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivminho:oai:repositorium.sdum.uminho.pt:1822_39804&Exemplar=1&LAN=DE A1 Alpuim, P A1 Majee, S A1 Cerqueira, M. F A1 Tondelier, D A1 Geffroy, B A1 Bonnassieux, Y A1 Bourée, J. E PB Elsevier YR 2015 K1 Silicon nitride K1 Hot-wire CVD K1 Low-temperature deposition K1 Ar plasma treatment K1 Permeation barrier K1 Polymer substrate K1 Ciências Naturais::Ciências Físicas K1 Science & Technology JF http://www.sciencedirect.com/science/article/pii/S0040609015009268 LK http://hdl.handle.net/1822/39804 DO http://hdl.handle.net/1822/39804 SF ELIB - SuUB Bremen
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