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Advanced characterization of high-k materials: a nuclear ap..:

Brijs, B ; Huyghebaert, C ; Nauwelaerts, S...
Brijs , B , Huyghebaert , C , Nauwelaerts , S , Caymax , M , Vandervorst , W , Nakajima , K , Kimura , K , Bergamier , A , Döllinger , G , Lennard , W N , Terwagne , G & Vantomme , A 2002 , ' Advanced characterization of high-k materials: a nuclear approach ' , Nuclear instruments and methods in physics research , vol. 190 , pp. 505-509 .. , 2002

Link: https://researchportal.unamur.be/en/publications/advan..

RT Journal
T1 <Title>Advanced characterization of high-k materials: a nuclear approach</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftunivnamurcrisp:oai:pure.unamur.be:publications_f76fa7f4-9904-450b-8e7a-22ba346b6d2b&Exemplar=1&LAN=DE
				
A1 Brijs, B
A1 Huyghebaert, C
A1 Nauwelaerts, S
A1 Caymax, M
A1 Vandervorst, W
A1 Nakajima, K
A1 Kimura, K
A1 Bergamier, A
A1 Döllinger, G
A1 Lennard, W.N
A1 Terwagne, Guy
A1 Vantomme, A
YR 2002
K1 Nuclear reaction analysis
K1 Thin film
K1 High-k
K1 Elastic recoil detection
K1 Rutherford backscattering
JF Brijs , B , Huyghebaert , C , Nauwelaerts , S , Caymax , M , Vandervorst , W , Nakajima , K , Kimura , K , Bergamier , A , Döllinger , G , Lennard , W N , Terwagne , G & Vantomme , A 2002 , ' Advanced characterization of high-k materials: a nuclear approach ' , Nuclear instruments and methods in physics research , vol. 190 , pp. 505-509 .
LK http://dx.doi.org/https://researchportal.unamur.be/en/publications/advanced-characterization-of-highk-materials-a-nuclear-approach(f76fa7f4-9904-450b-8e7a-22ba346b6d2b).html
DO https://researchportal.unamur.be/en/publications/advanced-characterization-of-highk-materials-a-nuclear-approach(f76fa7f4-9904-450b-8e7a-22ba346b6d2b).html
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