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Sputtered Ultrathin WO 3 for Realizing Room-Temperature Hig..:

Yu-Chuan Chiu ; Moumita Deb ; Po-Tsun Liu...
doi:10.1021/acsaelm.3c00725.s001. , 2023

Link: https://doi.org/10.1021/acsaelm.3c00725.s001

RT Journal
T1 <Title>Sputtered Ultrathin WO 3 for Realizing Room-Temperature High-Sensitive NO 2 Gas Sensors</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftunivoxfordfig:oai:figshare.com:article_24492323&Exemplar=1&LAN=DE
				
A1 Yu-Chuan Chiu
A1 Moumita Deb
A1 Po-Tsun Liu
A1 Hsiao-Wen Zan
A1 Yun-Ru Shih
A1 Yue Kuo
A1 Dun-Bao Ruan
A1 Kai-Jhih Gan
A1 Chih-Chieh Hsu
YR 2023
K1 Biological Sciences not elsewhere classified
K1 Chemical Sciences not elsewhere classified
K1 μm line width
K1 panel display technology
K1 good enough selectivity
K1 semiconductor gas sensor
K1 level crystal together
K1 68 ppm )
K1 detect 100 ppb
K1 commercial manufacturing process
K1 almost unchanged response
K1 3 </ sub
K1 2 </ sub
K1 100 ppb )
K1 sputtered ultrathin wo
K1 gas sensors
K1 17 ppm
K1 sputtering process
K1 sensing response
K1 nanometer process
K1 fast response
K1 ultrathin thickness
K1 surface roughness
K1 suitable control
K1 sensing layer
K1 room temperature
K1 relative humidity
K1 realizing room
K1 postannealing condition
K1 nondecayed sensing
K1 level detection
K1 humidity effect
K1 heating setup
K1 film resistor
K1 deposition condition
K1 deposition ambient
K1 current flat
K1 crystalline condition
K1 also discussed
K1 70 %
K1 5 nm
K1 14 days
K1 /∼ 21
JF doi:10.1021/acsaelm.3c00725.s001
LK http://dx.doi.org/https://doi.org/10.1021/acsaelm.3c00725.s001
DO https://doi.org/10.1021/acsaelm.3c00725.s001
SF ELIB - SuUB Bremen

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