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Raith EBPG5200+ Electron Beam Lithography Standard Operatin..:
Barth, David S
https://wiki.nano.upenn.edu/wiki/index.php?title=Raith_EBPG5200%2B_E-Beam_Lithography_System. , 2023
Link:
https://repository.upenn.edu/handle/20.500.14332/59337
RT Journal T1 <Title>Raith EBPG5200+ Electron Beam Lithography Standard Operating Procedure</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivpenn:oai:repository.upenn.edu:20.500.14332_59337&Exemplar=1&LAN=DE A1 Barth, David S YR 2023 K1 Engineering K1 Materials Engineering K1 Nanotechnology K1 Nanofabrication K1 Materials Science K1 QNF K1 Singh Center for Nanotechnology JF https://wiki.nano.upenn.edu/wiki/index.php?title=Raith_EBPG5200%2B_E-Beam_Lithography_System LK http://dx.doi.org/https://repository.upenn.edu/handle/20.500.14332/59337 DO https://repository.upenn.edu/handle/20.500.14332/59337 SF ELIB - SuUB Bremen
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