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1 Ergebnisse
1
IEMN - Deposition Techniques in Clean Room:
Roch-Jeune, Isabelle
;
Dewitte, Marc
;
Moncasi, Carlos
...
hal-04526167. , 2023
Link:
https://hal.science/hal-04526167
RT Journal T1
IEMN - Deposition Techniques in Clean Room
UL https://suche.suub.uni-bremen.de/peid=base-ftunivphautsdefr:oai:HAL:hal-04526167v1&Exemplar=1&LAN=DE A1 Roch-Jeune, Isabelle A1 Dewitte, Marc A1 Moncasi, Carlos A1 Crivello, Chiara A1 Guérin, David A1 Cochez, Guillaume A1 Chaillou, Jérémie PB HAL CCSD YR 2023 K1 SPUTTERING SYSTEMS K1 PE-CVD K1 AP-CVD K1 LP-CVD K1 ELECTRON BEAM K1 ALD K1 INKJET PRINTING K1 FURNACES K1 PARYLENE K1 [PHYS]Physics [physics] K1 [SPI]Engineering Sciences [physics] JF hal-04526167 LK http://dx.doi.org/https://hal.science/hal-04526167 DO https://hal.science/hal-04526167 SF ELIB - SuUB Bremen
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