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Submicron gap reduction of micro-resonator based on porous ..:
Lorrain, Nathalie
;
Pirasteh, Parastesh
;
Girault, Pauline
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.optmat.2018.11.038. , 2019
Link:
https://hal.science/hal-01955831
RT Journal T1 <Title>Submicron gap reduction of micro-resonator based on porous silica ridge waveguides manufactured by standard photolithographic process</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivrennes1hal:oai:HAL:hal-01955831v1&Exemplar=1&LAN=DE A1 Lorrain, Nathalie A1 Pirasteh, Parastesh A1 Girault, Pauline A1 Azuelos, Paul A1 Lemaitre, Jonathan A1 Guendouz, Mohammed A1 Hardy, Isabelle A1 Thual, Monique A1 Charrier, Joël PB HAL CCSD; Elsevier YR 2019 K1 Technological process K1 Oxidation K1 Micro-resonator K1 Porous silicon K1 Gap reduction K1 [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] K1 [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.optmat.2018.11.038 LK http://dx.doi.org/https://hal.science/hal-01955831 DO https://hal.science/hal-01955831 SF ELIB - SuUB Bremen
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