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1 Ergebnisse
1
Progress in OCT-based Through Silicon Via (TSV) metrology:
Iff, W. A
;
Sauvan, Christophe
;
Hugonin, J-P
...
info:eu-repo/semantics/altIdentifier/doi/10.1364/FIO.2019.JW4A.115. , 2019
Link:
https://hal.science/hal-02343398
RT Journal T1 <Title>Progress in OCT-based Through Silicon Via (TSV) metrology</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivstetienne:oai:HAL:hal-02343398v1&Exemplar=1&LAN=DE A1 Iff, W. A A1 Sauvan, Christophe A1 Hugonin, J-P A1 Besbes, M A1 Chavel, P A1 Vienne, G A1 Milord, L A1 Alliata, D A1 Herth, E A1 Coste, P A1 Bosseboeuf, Alain PB HAL CCSD YR 2019 K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics K1 [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic JF info:eu-repo/semantics/altIdentifier/doi/10.1364/FIO.2019.JW4A.115 LK http://dx.doi.org/https://hal.science/hal-02343398 DO https://hal.science/hal-02343398 SF ELIB - SuUB Bremen
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