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Innovative process to obtain thin films and micro-nanostruc..:
Vallejo-Otero, V
;
Crespo-Monteiro, N
;
Valour, A
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mtadv.2023.100430. , 2023
Link:
https://hal.science/hal-04229107
RT Journal T1 <Title>Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftunivstetienne:oai:HAL:hal-04229107v1&Exemplar=1&LAN=DE A1 Vallejo-Otero, V A1 Crespo-Monteiro, N A1 Valour, A A1 Donnet, C A1 Reynaud, S A1 Ollier, N A1 Blanc Mignon, M.F A1 Chatelon, J.P A1 Bleu, Y A1 Gamet, E A1 Jourlin, Y PB HAL CCSD; Elsevier YR 2023 K1 Zirconium nitride K1 Sol-gel method K1 Rapid thermal nitridation K1 Optical properties K1 Micro-nanostructuring K1 [CHIM.MATE]Chemical Sciences/Material chemistry JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mtadv.2023.100430 LK http://dx.doi.org/https://hal.science/hal-04229107 DO https://hal.science/hal-04229107 SF ELIB - SuUB Bremen
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