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Prediction of the evolution of defects induced by the heate..:
Julliard, P.L
;
Johnsson, A
;
Zographos, N
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sse.2022.108521. , 2023
Link:
https://laas.hal.science/hal-03867418
RT Journal T1
Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework
UL https://suche.suub.uni-bremen.de/peid=base-ftunivtoulouse2:oai:HAL:hal-03867418v1&Exemplar=1&LAN=DE A1 Julliard, P.L A1 Johnsson, A A1 Zographos, N A1 Demoulin, R A1 Monflier, Richard A1 Jay, A A1 Er-Riyahi, O A1 Monsieur, F A1 Joblot, S A1 Deprat, F A1 Rideau, D A1 Pichler, P A1 Hémeryck, Anne A1 Cristiano, Fuccio PB HAL CCSD; Elsevier YR 2023 K1 Kinetic Monte Carlo K1 Process simulations K1 Heated implantation K1 Multi-scale modeling K1 [SPI.TRON]Engineering Sciences [physics]/Electronics JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sse.2022.108521 LK http://dx.doi.org/https://laas.hal.science/hal-03867418 DO https://laas.hal.science/hal-03867418 SF ELIB - SuUB Bremen
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