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Test structures for accurate UHF C-V measurements of nano-s..:
Lee, Kyong-Taek
;
Schmitz, Jurriaan
;
Brown, George A
...
http://doc.utwente.nl/67079/1/lee_icmts.pdf. , 2007
Link:
http://purl.utwente.nl/publications/67079
RT Journal T1
Test structures for accurate UHF C-V measurements of nano-scale CMOSFETs with HfSiON and TiN metal gate
UL https://suche.suub.uni-bremen.de/peid=base-ftunivtwente:oai:doc.utwente.nl:67079&Exemplar=1&LAN=DE A1 Lee, Kyong-Taek A1 Schmitz, Jurriaan A1 Brown, George A A1 Heh, Dawei A1 Choi, Rino A1 Harris, Rusty A1 Song, Seung-Chul A1 Lee, Byoung Hun A1 Han, In-Sikh A1 Lee, Hi-Deok A1 Jeong, Yoon-Ha PB IEEE Computer Society Press YR 2007 JF http://doc.utwente.nl/67079/1/lee_icmts.pdf LK http://purl.utwente.nl/publications/67079 DO http://purl.utwente.nl/publications/67079 SF ELIB - SuUB Bremen
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