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1 Ergebnisse
1
Time-resolved Langmuir probe diagnostics of high-power puls..:
Pajdarová, Andrea Dagmar
;
Vlček, Jaroslav
;
Musil, Jindřich
..
XXVIII International conference on phenomena in ionized gases: July 15-20, 2007, Prague, Czech Republic: proceedings. , 2007
Link:
http://hdl.handle.net/11025/1439
RT Journal T1 <Title>Time-resolved Langmuir probe diagnostics of high-power pulsed dc magnetron discharges during deposition of copper films</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftuniwestbohemia:oai:dspace5.zcu.cz:11025_1439&Exemplar=1&LAN=DE A1 Pajdarová, Andrea Dagmar A1 Vlček, Jaroslav A1 Musil, Jindřich A1 Kudláček, Pavel A1 Lukáš, Jan PB Institute of Plasma Physics AS CR YR 2007 K1 vysokovýkonový pulzní magnetron K1 magnetronová depozice K1 Langmuirova sonda K1 plazmová fyzika K1 diagnostika K1 high-power pulsed magnetron K1 magnetron deposition K1 Langmuir probe K1 plasma physics K1 diagnostics JF XXVIII International conference on phenomena in ionized gases: July 15-20, 2007, Prague, Czech Republic: proceedings LK http://hdl.handle.net/11025/1439 DO http://hdl.handle.net/11025/1439 SF ELIB - SuUB Bremen
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