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1 Ergebnisse
1
Reactive Sputter Deposition of Functional Thin Films:
Liljeholm, Lina
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, 1651-6214. , 2012
Link:
http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-175666
RT Journal T1 <Title>Reactive Sputter Deposition of Functional Thin Films</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftuppsalauniv:oai:DiVA.org:uu-175666&Exemplar=1&LAN=DE A1 Liljeholm, Lina PB Uppsala universitet, Fasta tillståndets elektronik; Uppsala YR 2012 K1 thin film K1 reactive sputtering K1 coating K1 resonator K1 sensor K1 FBAR K1 SMR K1 aluminum nitride K1 (Al K1 B)N JF Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, 1651-6214 LK http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-175666 DO http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-175666 SF ELIB - SuUB Bremen
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