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Recommended reading list of early publications on atomic la..:
Ahvenniemi, Esko
;
Akbashev, Andrew R
;
Ali, Saima
...
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2017, 35:1,. , 2017
Link:
http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-316208
RT Journal T1
Recommended reading list of early publications on atomic layer deposition-Outcome of the "Virtual Project on the History of ALD"
UL https://suche.suub.uni-bremen.de/peid=base-ftuppsalauniv:oai:DiVA.org:uu-316208&Exemplar=1&LAN=DE A1 Ahvenniemi, Esko A1 Akbashev, Andrew R A1 Ali, Saima A1 Bechelany, Mikhael A1 Berdova, Maria A1 Boyadjiev, Stefan A1 Cameron, David C A1 Chen, Rong A1 Chubarov, Mikhail A1 Cremers, Veronique A1 Devi, Anjana A1 Drozd, Viktor A1 Elnikova, Liliya A1 Gottardi, Gloria A1 Grigoras, Kestutis A1 Hausmann, Dennis M A1 Hwang, Cheol Seong A1 Jen, Shih-Hui A1 Kallio, Tanja A1 Kanervo, Jaana A1 Khmelnitskiy, Ivan A1 Kim, Do Han A1 Klibanov, Lev A1 Koshtyal, Yury A1 Krause, A. Outi I A1 Kuhs, Jakob A1 Kaerkkaenen, Irina A1 Kaariainen, Marja-Leena A1 Kaariainen, Tommi A1 Lamagna, Luca A1 Lapicki, Adam A A1 Leskela, Markku A1 Lipsanen, Harri A1 Lyytinen, Jussi A1 Malkov, Anatoly A1 Malygin, Anatoly A1 Mennad, Abdelkader A1 Militzer, Christian A1 Molarius, Jyrki A1 Norek, Malgorzata A1 Ozgit-Akgun, Cagla A1 Panov, Mikhail A1 Pedersen, Henrik A1 Piallat, Fabien A1 Popov, Georgi A1 Puurunen, Riikka L A1 Rampelberg, Geert A1 Ras, Robin H. A A1 Rauwel, Erwan A1 Roozeboom, Fred A1 Sajavaara, Timo A1 Salami, Hossein A1 Savin, Hele A1 Schneider, Nathanaelle A1 Seidel, Thomas E A1 Sundqvist, Jonas A1 Suyatin, Dmitry B A1 Törndahl, Tobias A1 van Ommen, J. Ruud A1 Wiemer, Claudia A1 Ylivaara, Oili M. E A1 Yurkevich, Oksana PB Uppsala universitet, Fasta tillståndets elektronik; Aalto Univ, Dept Chem, POB 16100, FI-00076 Espoo, Finland.; Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA.; Aalto Univ, Sch Chem Technol, Dept Mat Sci & Engn, POB 16200, FI-00076 Aalto, Finland.; Univ Montpellier, ENSCM, CNRS, IEM,UMR 5635, Pl Eugene Bataillon, F-34095 Montpellier 5, France.; Univ Twente, Ind Focus Grp XUV Opt, NL-7522 ND Enschede, Netherlands.; Bulgarian Acad Sci, Inst Solid State Phys, 72 Tzarigradsko Chaussee Blvd, Sofia 1784, Bulgaria.; Masaryk Univ, CEPLANT, Kotlarska 267-2, CS-61137 Brno, Czech Republic.; Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Sch Opt & Elect Informat, 1037 Luoyu Rd, Wuhan 430074, Hubei, Peoples R China.; Univ Grenoble Alpes, CNRS, SIMAP, F-38000 Grenoble, France.; Univ Ghent, CoCooN, Dept Solid State Sci, Krijgslaan 281-S1, B-9000 Ghent, Belgium.; Ruhr Univ Bochum, Inorgan Mat Chem, D-44801 Bochum, Germany.; St Petersburg State Univ,... YR 2017 K1 Atom and Molecular Physics and Optics K1 Atom- och molekylfysik och optik K1 Engineering and Technology K1 Teknik och teknologier JF Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2017, 35:1, LK http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-316208 DO http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-316208 SF ELIB - SuUB Bremen
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