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High-mass metal ion irradiation enables growth of high-entr..:
Rogoz, Vladyslav
;
Pshyk, Oleksandr
;
Wicher, Bartosz
...
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2023, 41:6,. , 2023
Link:
http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-515671
RT Journal T1
High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets
UL https://suche.suub.uni-bremen.de/peid=base-ftuppsalauniv:oai:DiVA.org:uu-515671&Exemplar=1&LAN=DE A1 Rogoz, Vladyslav A1 Pshyk, Oleksandr A1 Wicher, Bartosz A1 Palisaitis, Justinas A1 Lu, Jun A1 Primetzhofer, Daniel A1 Petrov, Ivan A1 Hultman, Lars A1 Greczynski, Grzegorz PB Uppsala universitet, Tillämpad kärnfysik; Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.;Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, Wallenberg Initiat Mat Sci Sustainabil, SE-58183 Linköping, Sweden.;Sumy State Univ, 2, Rymskogo-Korsakova St, UA-40007 Sumy, Ukraine.; Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.;Empa Swiss Fed Labs Mat Sci & Technol, Lab Surface Sci & Coating Technol, Ueberlandstr 129, CH-8600 Dubendorf, Switzerland.; Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.;Warsaw Univ Technol, Fac Mat Sci & Engn, 141 Woloska St, PL-02507 Warsaw, Poland.; Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.; Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 ... YR 2023 K1 Materials Chemistry K1 Materialkemi K1 Condensed Matter Physics K1 Den kondenserade materiens fysik JF Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2023, 41:6, LK http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-515671 DO http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-515671 SF ELIB - SuUB Bremen
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