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Atomic layer deposition of crystalline molybdenum oxide thi..:

Mattinen, Miika ; King, Peter J ; Khriachtchev, Leonid...
https://strathprints.strath.ac.uk/65891/1/Mattinen_etal_MTC_2018_Atomic_layer_deposition_of_crystalline_molybdenum_oxide_thin_films.pdf.  , 2018