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Scanning probe lithography : state-of-the-art and future pe..:

Fan, Pengfei ; Gao, Jian ; Mao, Hui...
https://strathprints.strath.ac.uk/79361/7/Fan_etal_Micromachines_2022_Scanning_probe_lithography_state_of_the_art_and_future_perspectives.pdf.  , 2022