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Remote-refocus microscopy using a MEMS piston micromirror:

Christopher, Jay ; Rooney, Liam ; Uttamchandani, Deepak.
https://strathprints.strath.ac.uk/86131/1/Christopher_etal_mmc_2023_Remote_refocus_microscopy_using_a_MEMS_piston_micromirror.pdf.  , 2023