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Identification of electrostatically actuated mems models fr..:
Casenave, Céline
;
Montseny, Emmanuel
;
Camon, Henri
info:eu-repo/semantics/altIdentifier/doi/10.3182/20090706-3-FR-2004.00289. , 2009
Link:
https://inria.hal.science/hal-01061510
RT Journal T1
Identification of electrostatically actuated mems models from real measurement data
UL https://suche.suub.uni-bremen.de/peid=base-ftutoulouse3hal:oai:HAL:hal-01061510v1&Exemplar=1&LAN=DE A1 Casenave, Céline A1 Montseny, Emmanuel A1 Camon, Henri PB HAL CCSD YR 2009 K1 dynamic models K1 parameters identification K1 nonlinear models K1 least-squares identification K1 [SPI.AUTO]Engineering Sciences [physics]/Automatic K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics JF info:eu-repo/semantics/altIdentifier/doi/10.3182/20090706-3-FR-2004.00289 LK http://dx.doi.org/https://inria.hal.science/hal-01061510 DO https://inria.hal.science/hal-01061510 SF ELIB - SuUB Bremen
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