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Speeding up the unique assets of atomic layer deposition:
Munoz-Rojas, David
;
Maindron, T
;
Esteve, A
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mtchem.2018.11.013. , 2019
Link:
https://hal.science/hal-02012583
RT Journal T1 <Title>Speeding up the unique assets of atomic layer deposition</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftutoulouse3hal:oai:HAL:hal-02012583v1&Exemplar=1&LAN=DE A1 Munoz-Rojas, David A1 Maindron, T A1 Esteve, A A1 Piallat, F A1 Kools, J.C.S A1 Decams, J.-M PB HAL CCSD; Elsevier YR 2019 K1 [CHIM.MATE]Chemical Sciences/Material chemistry JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mtchem.2018.11.013 LK http://dx.doi.org/https://hal.science/hal-02012583 DO https://hal.science/hal-02012583 SF ELIB - SuUB Bremen
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