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1 Ergebnisse
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ALD Precursors Study on Structural and Thermal Characterist..:
Beer, Sebastian, M J
;
Krusenbaum, Annika
;
Winter, Manuela
..
info:eu-repo/semantics/altIdentifier/doi/10.1002/ejic.202000436. , 2020
Link:
https://hal.science/hal-02962225
RT Journal T1
ALD Precursors Study on Structural and Thermal Characteristics of Heteroleptic Yttrium Complexes as Potential Precursors for Vapor Phase Deposition
UL https://suche.suub.uni-bremen.de/peid=base-ftutoulouse3hal:oai:HAL:hal-02962225v1&Exemplar=1&LAN=DE A1 Beer, Sebastian, M J A1 Krusenbaum, Annika A1 Winter, Manuela A1 Vahlas, Constantin A1 Devi, Anjana PB HAL CCSD; Wiley-VCH Verlag YR 2020 K1 [CHIM.MATE]Chemical Sciences/Material chemistry JF info:eu-repo/semantics/altIdentifier/doi/10.1002/ejic.202000436 LK http://dx.doi.org/https://hal.science/hal-02962225 DO https://hal.science/hal-02962225 SF ELIB - SuUB Bremen
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