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1 Ergebnisse
1
Dark-field electron holography as a recording of crystal di..:
Boureau, Victor
;
Durand, Aurèle
;
Gergaud, Patrice
...
info:eu-repo/semantics/altIdentifier/doi/10.1107/S1600576720006020. , 2020
Link:
https://hal.science/hal-03001931
RT Journal T1
Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs
UL https://suche.suub.uni-bremen.de/peid=base-ftutoulouse3hal:oai:HAL:hal-03001931v1&Exemplar=1&LAN=DE A1 Boureau, Victor A1 Durand, Aurèle A1 Gergaud, Patrice A1 Le Cunff, Delphine A1 Wormington, Matthew A1 Rouchon, Denis A1 Claverie, Alain A1 Benoit, Daniel A1 Hÿtch, Martin PB HAL CCSD; International Union of Crystallography YR 2020 K1 diffraction K1 elastic strain K1 geometric phase K1 dark-field electron holography (DFEH) K1 high-resolution xray diffraction (HRXRD) K1 metal-oxide-semiconductor field-effect-transistor (MOSFET) K1 [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] K1 [PHYS.MECA.MSMECA]Physics [physics]/Mechanics [physics]/Materials and structures in mechanics [physics.class-ph] K1 [CHIM.CRIS]Chemical Sciences/Cristallography K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics JF info:eu-repo/semantics/altIdentifier/doi/10.1107/S1600576720006020 LK http://dx.doi.org/https://hal.science/hal-03001931 DO https://hal.science/hal-03001931 SF ELIB - SuUB Bremen
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