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Investigation of Oxygen penetration during UV Nanosecond La..:
Monflier, Richard
;
Tabata, Toshiyuki
;
Rizk, Hiba
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.apsusc.2021.149071. , 2021
Link:
https://laas.hal.science/hal-03098053
RT Journal T1 <Title>Investigation of Oxygen penetration during UV Nanosecond Laser Annealing of Silicon at high energy densities</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftutoulouse3hal:oai:HAL:hal-03098053v1&Exemplar=1&LAN=DE A1 Monflier, Richard A1 Tabata, Toshiyuki A1 Rizk, Hiba A1 Roul, Julien A1 Huet, Karim A1 Mazzamuto, Fulvio A1 Acosta Alba, Pablo A1 Kerdiles, Sebastien A1 Boninelli, Simona A1 La Magna, Antonino A1 Scheid, Emmanuel A1 Cristiano, Fuccio A1 Bedel-Pereira, Eléna PB HAL CCSD; Elsevier YR 2021 K1 [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.apsusc.2021.149071 LK http://dx.doi.org/https://laas.hal.science/hal-03098053 DO https://laas.hal.science/hal-03098053 SF ELIB - SuUB Bremen
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