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1 Ergebnisse
1
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroel..:
Di Palma, Valerio
;
Pianalto, Andrea
;
Perego, Michele
...
https://zenodo.org/record/7707931. , 2023
Link:
https://zenodo.org/record/7707931
RT Journal T1
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics
UL https://suche.suub.uni-bremen.de/peid=base-ftzenodo:oai:zenodo.org:7707931&Exemplar=1&LAN=DE A1 Di Palma, Valerio A1 Pianalto, Andrea A1 Perego, Michele A1 Tallarida, Grazia A1 Codegoni, Davide A1 Fanciulli, Marco YR 2023 K1 Atomic Layer deposition K1 IrO2 K1 Neuroelectronics K1 Microelectrode arrays JF https://zenodo.org/record/7707931 LK http://dx.doi.org/https://zenodo.org/record/7707931 DO https://zenodo.org/record/7707931 SF ELIB - SuUB Bremen
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