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1 Ergebnisse
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Lithography and Etching‐Free Microfabrication of Silicon Ca..:
Nguyen, Tuan‐Khoa
;
Phan, Hoang-Phuong
;
Dowling, Karen M.
...
Advanced Engineering Materials. 22 (2020) 4 - p. , 2020
Link:
https://doi.org/10.1002/adem.201901173
RT Journal T1
Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_adem.201901173&Exemplar=1&LAN=DE A1 Nguyen, Tuan‐Khoa A1 Phan, Hoang-Phuong A1 Dowling, Karen M. A1 Yalamarthy, Ananth Saran A1 Dinh, Toan A1 Balakrishnan, Vivekananthan A1 Liu, Tanya A1 Chapin, Caitlin A. A1 Truong, Quoc-Dung A1 Dau, Van Thanh A1 Goodson, Kenneth E. A1 Senesky, Debbie G. A1 Dao, Dzung Viet A1 Nguyen, Nam-Trung PB Wiley YR 2020 SN 1438-1656 SN 1527-2648 JF Advanced Engineering Materials VO 22 IS 4 LK http://dx.doi.org/https://doi.org/10.1002/adem.201901173 DO https://doi.org/10.1002/adem.201901173 SF ELIB - SuUB Bremen
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