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Tuning the Performance of Negative Tone Electron Beam Resis..:
Lewis, Scott M.
;
DeRose, Guy A.
;
Alty, Hayden R.
...
Advanced Functional Materials. 32 (2022) 32 - p. , 2022
Link:
https://doi.org/10.1002/adfm.202202710
RT Journal T1
Tuning the Performance of Negative Tone Electron Beam Resists for the Next Generation Lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_adfm.202202710&Exemplar=1&LAN=DE A1 Lewis, Scott M. A1 DeRose, Guy A. A1 Alty, Hayden R. A1 Hunt, Matthew S. A1 Lee, Nathan A1 Mann, James A. A1 Grindell, Richard A1 Wertheim, Alex A1 De Rose, Lucia A1 Fernandez, Antonio A1 Muryn, Christopher A. A1 Whitehead, George F. S. A1 Timco, Grigore A. A1 Scherer, Axel A1 Winpenny, Richard E. P. PB Wiley YR 2022 SN 1616-301X SN 1616-3028 JF Advanced Functional Materials VO 32 IS 32 LK http://dx.doi.org/https://doi.org/10.1002/adfm.202202710 DO https://doi.org/10.1002/adfm.202202710 SF ELIB - SuUB Bremen
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