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1 Ergebnisse
1
Semiconductor Processing: Novel Hybrid Organic–Inorganic Sp..:
Zanchetta, Erika
;
Giustina, Gioia Della
;
Grenci, Gianluca
...
Advanced Materials. 25 (2013) 43 - p. 6304-6304 , 2013
Link:
https://doi.org/10.1002/adma.201370271
RT Journal T1
Semiconductor Processing: Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching (Adv. Mater. 43/2013)
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_adma.201370271&Exemplar=1&LAN=DE A1 Zanchetta, Erika A1 Giustina, Gioia Della A1 Grenci, Gianluca A1 Pozzato, Alessandro A1 Tormen, Massimo A1 Brusatin, Giovanna PB Wiley YR 2013 SN 0935-9648 SN 1521-4095 JF Advanced Materials VO 25 IS 43 SP 6304 OP 6304 LK http://dx.doi.org/https://doi.org/10.1002/adma.201370271 DO https://doi.org/10.1002/adma.201370271 SF ELIB - SuUB Bremen
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