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Novolak-Diazoquinone Resists: The Imaging Systems of the Co..:
Reiser, Arnost
;
Shih, Hsiao-Yi
;
Yeh, Tung-Feng
.
Angewandte Chemie International Edition in English. 35 (1996) 21 - p. 2428-2440 , 1996
Link:
https://doi.org/10.1002/anie.199624281
RT Journal T1 <Title>Novolak-Diazoquinone Resists: The Imaging Systems of the Computer Chip</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_anie.199624281&Exemplar=1&LAN=DE A1 Reiser, Arnost A1 Shih, Hsiao-Yi A1 Yeh, Tung-Feng A1 Huang, Jian-Ping PB Wiley YR 1996 SN 0570-0833 SN 1521-3773 JF Angewandte Chemie International Edition in English VO 35 IS 21 SP 2428 OP 2440 LK http://dx.doi.org/https://doi.org/10.1002/anie.199624281 DO https://doi.org/10.1002/anie.199624281 SF ELIB - SuUB Bremen
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