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1 Ergebnisse
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Formation of Silicon (Si) Grains in AlN Thin Layer Grown on..:
Kim, Young Heon
;
Ahn, Sang Jung
;
Lee, Sang Tae
..
Bulletin of the Korean Chemical Society. 36 (2015) 3 - p. 1008-1012 , 2015
Link:
https://doi.org/10.1002/bkcs.10190
RT Journal T1 <Title>Formation of Silicon (Si) Grains in AlN Thin Layer Grown on an Si(1 1 1) Substrate: Effect of Deposition Sequence#</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_bkcs.10190&Exemplar=1&LAN=DE A1 Kim, Young Heon A1 Ahn, Sang Jung A1 Lee, Sang Tae A1 Kim, Moondeock A1 Oh, Jae Eung PB Wiley YR 2015 SN 1229-5949 SN 1229-5949 JF Bulletin of the Korean Chemical Society VO 36 IS 3 SP 1008 OP 1012 LK http://dx.doi.org/https://doi.org/10.1002/bkcs.10190 DO https://doi.org/10.1002/bkcs.10190 SF ELIB - SuUB Bremen
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