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Spectroscopic Diagnostics of Pulsed Microwave Plasmas used ..:
Bénédic, Fabien
;
Duten, Xavier
;
Syll, Ousmane
...
Chemical Vapor Deposition. 14 (2008) 7-8 - p. 173-180 , 2008
Link:
https://doi.org/10.1002/cvde.200706658
RT Journal T1
Spectroscopic Diagnostics of Pulsed Microwave Plasmas used for Nanocrystalline Diamond Growth
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_cvde.200706658&Exemplar=1&LAN=DE A1 Bénédic, Fabien A1 Duten, Xavier A1 Syll, Ousmane A1 Lombardi, Guillaume A1 Hassouni, Khaled A1 Gicquel, Alix PB Wiley YR 2008 SN 0948-1907 SN 1521-3862 JF Chemical Vapor Deposition VO 14 IS 7-8 SP 173 OP 180 LK http://dx.doi.org/https://doi.org/10.1002/cvde.200706658 DO https://doi.org/10.1002/cvde.200706658 SF ELIB - SuUB Bremen
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